EXT
Edwards
| Model | nEXT240D | nEXT300D | nEXT400D | EXT75DX | EXT556H | |
| Inlet Flange | DN | 100 ISO-K/CF | 100 ISO-K/CF | 160 ISO-K/CF | 63ISO-K/CF 40NW or 100 ISO-K | 160 ISO-K/CF |
| Pump Speed | ||||||
| N2 | l*S-1 | 240 | 300 | 400 | 61/42/66 | 540 |
| He | 230 | 340 | 390 | 57/49/59 | 580 | |
| H2 | 165 | 280 | 325 | 53/48/54 | 500 | |
| Ultimate Pressure ISO/CF | mbar | <6x10-8(<5x10-10) | <1x10-8(<1x10-10) | <5x10-8(<5x10-10) | <1x10-10 | |
| Rotational Speed | rpm | 60000 | 90000 | 50000 | ||
| Model | nEXT240D | nEXT300D | nEXT400D | EXT75DX | EXT556H | |
| Inlet Flange | DN | 100 ISO-K/CF | 100 ISO-K/CF | 160 ISO-K/CF | 63ISO-K/CF 40NW or 100 ISO-K | 160 ISO-K/CF |
| Pump Speed | ||||||
| N2 | l*S-1 | 240 | 300 | 400 | 61/42/66 | 540 |
| He | 230 | 340 | 390 | 57/49/59 | 580 | |
| H2 | 165 | 280 | 325 | 53/48/54 | 500 | |
| Ultimate Pressure ISO/CF | mbar | <6x10-8(<5x10-10) | <1x10-8(<1x10-10) | <5x10-8(<5x10-10) | <1x10-10 | |
| Rotational Speed | rpm | 60000 | 90000 | 50000 | ||